JPS62184446U - - Google Patents
Info
- Publication number
- JPS62184446U JPS62184446U JP7149086U JP7149086U JPS62184446U JP S62184446 U JPS62184446 U JP S62184446U JP 7149086 U JP7149086 U JP 7149086U JP 7149086 U JP7149086 U JP 7149086U JP S62184446 U JPS62184446 U JP S62184446U
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- gas
- inlet
- quartz crystal
- pressure sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 claims description 6
- 239000010453 quartz Substances 0.000 claims 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 3
- 238000001514 detection method Methods 0.000 claims 1
- 239000011148 porous material Substances 0.000 claims 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7149086U JPS62184446U (en]) | 1986-05-13 | 1986-05-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7149086U JPS62184446U (en]) | 1986-05-13 | 1986-05-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62184446U true JPS62184446U (en]) | 1987-11-24 |
Family
ID=30914091
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7149086U Pending JPS62184446U (en]) | 1986-05-13 | 1986-05-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62184446U (en]) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5935122A (ja) * | 1982-08-23 | 1984-02-25 | Toyo Commun Equip Co Ltd | 気体の圧力センサ |
-
1986
- 1986-05-13 JP JP7149086U patent/JPS62184446U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5935122A (ja) * | 1982-08-23 | 1984-02-25 | Toyo Commun Equip Co Ltd | 気体の圧力センサ |